Title :
Metal-semiconductor-metal photodetectors using widegap semiconductor capping layer
Author :
Lee, Hsin-Ying ; Lee, Ching-Ting
Author_Institution :
Inst. of Opt. Sci., Nat. Central Univ., Chung-li, Taiwan
Abstract :
To improve the Schottky contact performances and carrier confinement, we employed the wide bandgap material InAlGaP for the capping in the metal-semiconductor-metal photodetectors (MSM-PDs). The electrical behaviors of InAlGaP/GaAs MSM-PD are studied by reverse dark current-voltage measurements at different temperatures. The reverse characteristics of the Schottky contact are examined by taking into account the dependence of the barrier height on the electric field in the depletion region and hence on the applied bias. We investigated the possibilities of evaluating the main Schottky contact parameters straight on the MSM-PD structure with and without capping layer InAlGaP. We also measured the relationship between the photoresponsivity and difference photon wavelength.
Keywords :
III-V semiconductors; Schottky barriers; aluminium compounds; gallium compounds; indium compounds; metal-semiconductor-metal structures; photodetectors; wide band gap semiconductors; InAlGaP-GaAs; Schottky contact performances; applied bias; barrier height; capping layer InAlGaP; carrier confinement; depletion region; electric field; electrical behaviors; main Schottky contact parameters; metal-semiconductor-metal photodetectors; photon wavelength; photoresponsivity; reverse characteristics; reverse dark current-voltage measurements; wide bandgap material; widegap semiconductor capping layer; Carrier confinement; Current measurement; Electric variables measurement; Gallium arsenide; Inorganic materials; Photodetectors; Photonic band gap; Schottky barriers; Semiconductor materials; Temperature measurement;
Conference_Titel :
Optoelectronics, Proceedings of the Sixth Chinese Symposium
Print_ISBN :
0-7803-7887-3
DOI :
10.1109/COS.2003.1278154