DocumentCode
2696539
Title
Impact of high optical power on optical MEMS
Author
Spahn, Olga Blum ; Phinney, Leslie M. ; Wong, C. Channy ; Cowan, William D. ; Adams, David P. ; Grossete, Grant D.
Author_Institution
Sandia Nat. Labs., Albuquerque, NM
fYear
2008
fDate
11-14 Aug. 2008
Firstpage
68
Lastpage
69
Abstract
A number of applications require optical MEMS devices to handle high optical power. We present theoretical and experimental results for SUMMiTtrade fabricated mirrors and other structures illustrating performance limitations and several mitigation strategies.
Keywords
deformation; laser beam effects; micromirrors; optical fabrication; MEMS mirror deformation; SUMMiT fabricated mirrors; high optical power handling; laser exposure; mitigation strategies; optical MEMS device; Coatings; Heating; Laser theory; Metallization; Micromechanical devices; Mirrors; Optical devices; Optical interferometry; Optical surface waves; Power lasers; MEMS mirrors; deformation; optical power handling;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location
Freiburg
Print_ISBN
978-1-4244-1917-3
Electronic_ISBN
978-1-4244-1918-0
Type
conf
DOI
10.1109/OMEMS.2008.4607832
Filename
4607832
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