Title :
Impact of high optical power on optical MEMS
Author :
Spahn, Olga Blum ; Phinney, Leslie M. ; Wong, C. Channy ; Cowan, William D. ; Adams, David P. ; Grossete, Grant D.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
A number of applications require optical MEMS devices to handle high optical power. We present theoretical and experimental results for SUMMiTtrade fabricated mirrors and other structures illustrating performance limitations and several mitigation strategies.
Keywords :
deformation; laser beam effects; micromirrors; optical fabrication; MEMS mirror deformation; SUMMiT fabricated mirrors; high optical power handling; laser exposure; mitigation strategies; optical MEMS device; Coatings; Heating; Laser theory; Metallization; Micromechanical devices; Mirrors; Optical devices; Optical interferometry; Optical surface waves; Power lasers; MEMS mirrors; deformation; optical power handling;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607832
