DocumentCode
2696600
Title
3D imaging using resonant large-aperture MEMS mirror arrays and laser distance measurement
Author
Sandner, Thilo ; Wildenhain, Michael ; Klose, Thomas ; Schenk, Harald ; Schwarzer, Stefan ; Hinkov, Vladimir ; Hofler, H. ; Wölfelschneider, Harald
Author_Institution
Micro Scanner Devices, Fraunhofer Inst. for Photonic Microsyst., Dresden
fYear
2008
fDate
11-14 Aug. 2008
Firstpage
78
Lastpage
79
Abstract
We present a system concept for a scanning laser radar employing a newly developed MEMS mirror array. The array solution permits large reception apertures while preserving outstanding reliability, high scanning speed, compact size and small system weight. We show first results using a single-mirror prototype.
Keywords
laser ranging; micromirrors; optical radar; optical scanners; 3D imaging; MEMS mirror arrays; laser distance measurement; laser radar; reception apertures; single-mirror prototype; Apertures; Distance measurement; Laser radar; Micromechanical devices; Mirrors; Optical arrays; Optical scattering; Optical sensors; Resonance; Surface emitting lasers; MEMS; high speed; large aperture; laser radar; mirror array; scanning;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location
Freiburg
Print_ISBN
978-1-4244-1917-3
Electronic_ISBN
978-1-4244-1918-0
Type
conf
DOI
10.1109/OMEMS.2008.4607837
Filename
4607837
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