DocumentCode :
2696675
Title :
Zone-melting Recrystallization Of Si Films By Flat Gas Flame Heating
Author :
Kanai, Syungo ; Futagi, Sadaki ; Kugenuma, Makoto ; Takeuchi, Masaki ; Kitagawa, Akio ; Suzuki, Masakuni ; Takenaka, Satoshi
fYear :
1993
fDate :
9-11 Jun 1993
Firstpage :
37
Lastpage :
40
Keywords :
Crystallization; Fires; Fluctuations; Fuels; Heating; Insulation; Research and development; Semiconductor films; Silicon; Temperature control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
Type :
conf
DOI :
10.1109/IEMT.1993.639325
Filename :
639325
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2696675
