DocumentCode :
2696717
Title :
MEMS deformable mirrors for adaptive optics using single crystal PMN-PT
Author :
Park, Hyunkyu ; Horsley, David A.
Author_Institution :
Mech. & Aeronaut. Eng., California Univ., Davis, CA
fYear :
2008
fDate :
11-14 Aug. 2008
Firstpage :
90
Lastpage :
91
Abstract :
A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.
Keywords :
adaptive optics; lead compounds; micromirrors; ophthalmic lenses; MEMS deformable mirrors; PMN-PbTiO3; ophthalmologic adaptive optics; single crystal PMN-PT; wavefront corrector; Adaptive optics; Apertures; Chromium; Delta modulation; Electrodes; Fabrication; Gold; Hafnium; Micromechanical devices; Mirrors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
Type :
conf
DOI :
10.1109/OMEMS.2008.4607843
Filename :
4607843
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2696717
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