DocumentCode
2696772
Title
Optical scanner with deformable mirror fabricated from SOI wafer
Author
Sasaki, Takashi ; Hane, Kazuhiro
Author_Institution
Dept. of Nanomech., Tohoku Univ., Sendai
fYear
2008
fDate
11-14 Aug. 2008
Firstpage
96
Lastpage
97
Abstract
An optical scanner with a deformable mirror is fabricated using SOI wafer. A 1 mum thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80 V. The deformation at the mirror center is 3 nm at 100 V.
Keywords
electrostatic actuators; mirrors; optical fabrication; optical scanners; silicon-on-insulator; surface roughness; SOI wafer; Si; comb actuator; deformable mirror; electronic connections; electrostatic force; optical scanner; rotation angle; silicon substrate; surface roughness; voltage 100 V; voltage 80 V; Counting circuits; Electrodes; Etching; Gold; Mirrors; Optical films; Semiconductor films; Silicon; Substrates; Voltage; SOI wafer; scanner; wave front control;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location
Freiburg
Print_ISBN
978-1-4244-1917-3
Electronic_ISBN
978-1-4244-1918-0
Type
conf
DOI
10.1109/OMEMS.2008.4607846
Filename
4607846
Link To Document