Title :
Spatially resolved optical characterization of photonic crystal slabs using direct evaluation of photonic modes
Author :
Nazirizadeh, Yousef ; Geyer, Ulf ; Lemmer, Uli ; Gerken, Martina
Author_Institution :
Light Technol. Inst., Univ. Karlsruhe (TH), Karlsruhe
Abstract :
Transmission measurements with crossed polarization filters are performed in a confocal microscope setup for spatially resolved evaluation of photonic crystal modes. The homogeneity of samples fabricated with electron-beam lithography and laser interference lithography is investigated.
Keywords :
electron beam lithography; laser materials processing; light polarisation; light transmission; optical fabrication; optical filters; optical materials; photolithography; photonic crystals; confocal microscope; crossed polarization filters; electron-beam lithography; guided-mode resonance; laser interference lithography; photonic crystal modes; photonic crystal slabs; spatially resolved optical characterization; transmission measurement; Interference; Laser modes; Lithography; Microscopy; Optical filters; Optical polarization; Performance evaluation; Photonic crystals; Slabs; Spatial resolution; guided-mode resonances; photonic crystal slabs; polarization; transmission;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607854
