Low operation voltage non self-emissive MEMS color filter pixels

Author

Lo, Cheng-Yao ; Hast, Jukka ; Huttunen, Olli-Heikki ; Petäjä, Jarno ; Hiitola-Keinänen, Johanna ; Maaninen, Arto ; Kopola, Harri ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi

Author_Institution

Inst. of Ind. Sci., Univ. of Tokyo, Tokyo

fYear

2008

fDate

11-14 Aug. 2008

Firstpage

116

Lastpage

117

Abstract

A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton´s rings´ size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.

Keywords

Fabry-Perot interferometers; electro-optical filters; interference filters; low-power electronics; micro-optomechanical devices; optical design techniques; optical multilayers; Newton´s ring size reduction; air grooves design; least multilayer design; low operation voltage operation; microelectro mechanical system Fabry-Perot interference device; nonself-emissive MEMS color filter pixels; seesaw effect; spacer layer structure; Degradation; Displays; Electrostatics; Fabry-Perot; Filters; Interference; Low voltage; Mechanical systems; Micromechanical devices; Nonhomogeneous media; Fabry-Perot; MEMS (micro electro mechanical system); air groove; color filter; seesaw effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Conference_Location

Freiburg

Print_ISBN

978-1-4244-1917-3

Electronic_ISBN

978-1-4244-1918-0

Type

conf

DOI

10.1109/OMEMS.2008.4607856

Filename

4607856