Title :
Polymer deformable membrane mirrors for focus control using SU-8 2002
Author :
Dunbar, Erwin ; Leone, Matthew ; Lukes, Sarah ; Dickensheets, David L.
Author_Institution :
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT
Abstract :
Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.
Keywords :
aberrations; aluminium; membranes; mirrors; optical control; optical design techniques; optical focusing; optical polymers; photoresists; Al; SU-8 2002 epoxy membranes; focus control; polymer deformable membrane mirrors; size 2 mum; spherical aberration; Aluminum; Biomembranes; Coatings; Electrodes; Focusing; Microscopy; Mirrors; Optical control; Polymers; Silicon;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607867
