DocumentCode
2697216
Title
A micromirror scanner with vertical combs tilted by assembly process
Author
Jun, Min-Ho ; Yun, Sungsik ; Kim, Man Geun ; Lee, Sung-Kil ; Lee, Jong-Hyun
Author_Institution
Sch. of Inf. & Mechatron., Gwangju Inst. of Sci. & Technol. (GIST), Gwangju
fYear
2008
fDate
11-14 Aug. 2008
Firstpage
146
Lastpage
147
Abstract
We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro mirror. The fabricated mirror scanner showed the optical scan angle of up to 1.3deg at 60 V and the resonant frequency of 3.15 kHz.
Keywords
electrodes; electrostatic actuators; micromirrors; optical fabrication; optical scanners; alignment pillar; assembly process; electrostatic micromirror scanner; frequency 3.15 kHz; in-plane vertical comb electrodes; optical scan angle; resonant frequency; tilting; voltage 60 V; Assembly systems; Biomedical optical imaging; Electrostatics; Etching; Fabrication; Micromirrors; Mirrors; Resonant frequency; Silicon; Springs; alignment pillar; assembly; mirror scanner; tilting; vertical combs;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location
Freiburg
Print_ISBN
978-1-4244-1917-3
Electronic_ISBN
978-1-4244-1918-0
Type
conf
DOI
10.1109/OMEMS.2008.4607871
Filename
4607871
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