Title :
A micromirror scanner with vertical combs tilted by assembly process
Author :
Jun, Min-Ho ; Yun, Sungsik ; Kim, Man Geun ; Lee, Sung-Kil ; Lee, Jong-Hyun
Author_Institution :
Sch. of Inf. & Mechatron., Gwangju Inst. of Sci. & Technol. (GIST), Gwangju
Abstract :
We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro mirror. The fabricated mirror scanner showed the optical scan angle of up to 1.3deg at 60 V and the resonant frequency of 3.15 kHz.
Keywords :
electrodes; electrostatic actuators; micromirrors; optical fabrication; optical scanners; alignment pillar; assembly process; electrostatic micromirror scanner; frequency 3.15 kHz; in-plane vertical comb electrodes; optical scan angle; resonant frequency; tilting; voltage 60 V; Assembly systems; Biomedical optical imaging; Electrostatics; Etching; Fabrication; Micromirrors; Mirrors; Resonant frequency; Silicon; Springs; alignment pillar; assembly; mirror scanner; tilting; vertical combs;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607871
