Title :
Fabrication of 2D and 3D photonic quasi-crystals with high rotation symmetry by holographic lithography technique
Author :
Hsu, Chia Chen ; Lai, Ngoc Diep ; Lin, Jian Hung
Author_Institution :
Dept. of Phys., Nat. Chung Cheng Univ., Chiayi
Abstract :
We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.
Keywords :
holography; optical design techniques; optical fabrication; optical materials; optical prisms; photolithography; photonic crystals; 2D photonic quasicrystal fabrication; 3D photonic quasicrystal fabrication; compact fabrication technique; double-exposure three-beam technique; high rotation symmetry; holographic lithography technique; multisurface prism; optical design; periodic structures; three-beam-plus-one interference technique; Holographic optical components; Holography; Interference; Laser beams; Lithography; Optical device fabrication; Periodic structures; Refractive index; Resists; Surface emitting lasers; Holography; Optical design and fabrication; Photolithography; Photonic quasi-crystals;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607878
