Title :
The torque-enhancement design for magnetostatic scanner
Author :
Tang, Tsung-Lin ; Chen, Wen-Chien ; Chen, Rongshun ; Fang, Weileun
Author_Institution :
Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu
Abstract :
This study presents two designs to enhance the magnetostatic torque to drive the scanner, (1) the lever arm, and (2) the ferromagnetic material pattern with higher length to width ratio.
Keywords :
magnetostatics; micro-optics; optical scanners; torque; ferromagnetic material pattern; lever arm; magnetostatic scanner; magnetostatic torque; torque-enhancement design; Fabrication; Frequency response; Gold; Magnetic materials; Magnetostatics; Mirrors; Nickel; Optical devices; Silicon; Torque;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607880
