• DocumentCode
    2697342
  • Title

    The torque-enhancement design for magnetostatic scanner

  • Author

    Tang, Tsung-Lin ; Chen, Wen-Chien ; Chen, Rongshun ; Fang, Weileun

  • Author_Institution
    Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu
  • fYear
    2008
  • fDate
    11-14 Aug. 2008
  • Firstpage
    164
  • Lastpage
    165
  • Abstract
    This study presents two designs to enhance the magnetostatic torque to drive the scanner, (1) the lever arm, and (2) the ferromagnetic material pattern with higher length to width ratio.
  • Keywords
    magnetostatics; micro-optics; optical scanners; torque; ferromagnetic material pattern; lever arm; magnetostatic scanner; magnetostatic torque; torque-enhancement design; Fabrication; Frequency response; Gold; Magnetic materials; Magnetostatics; Mirrors; Nickel; Optical devices; Silicon; Torque;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
  • Conference_Location
    Freiburg
  • Print_ISBN
    978-1-4244-1917-3
  • Electronic_ISBN
    978-1-4244-1918-0
  • Type

    conf

  • DOI
    10.1109/OMEMS.2008.4607880
  • Filename
    4607880
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2697342