• DocumentCode
    2697394
  • Title

    CMOS-SOI-MEMS transistor (TMOS) for infrared imaging

  • Author

    Gitelman, Leonid ; Gutman, Zivit ; Bar-Lev, Sharon ; Stolyarova, Sara ; Nemirovsky, Yael

  • Author_Institution
    Dept. of Electr. Eng., Technion - Israel Inst. of Technol., Haifa
  • fYear
    2008
  • fDate
    11-14 Aug. 2008
  • Firstpage
    172
  • Lastpage
    173
  • Abstract
    The novel concept of thermally isolated CMOS-SOI-MEMS transistor serving as IR detector (TMOS) is presented and characterized, showing high potential for thermal imaging, allowing long integration time because of negligible self heating.
  • Keywords
    CMOS integrated circuits; MOSFET; infrared detectors; infrared imaging; micromechanical devices; silicon-on-insulator; CMOS-SOI-MEMS transistor; infrared detector; infrared imaging; thermal imaging; thermal isolation; Bolometers; CMOS technology; Etching; Frequency measurement; Heating; Infrared imaging; MOSFETs; Sensor arrays; Thermal conductivity; Thermal factors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
  • Conference_Location
    Freiburg
  • Print_ISBN
    978-1-4244-1917-3
  • Electronic_ISBN
    978-1-4244-1918-0
  • Type

    conf

  • DOI
    10.1109/OMEMS.2008.4607884
  • Filename
    4607884
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2697394