Title :
Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors
Author :
Quack, Niels ; Rust, Philipp ; Blunier, Stefan ; Dual, Jurg ; Felder, Ferdinand ; Arnold, Martin ; Rahim, Mohamed ; Fill, Matthias ; Zogg, Hans
Author_Institution :
Dept. of Mech. & Process Eng., ETH Zurich, Zurich
Abstract :
Results on a tunable resonant cavity enhanced detector (RCED) in the mid-infrared employing a vertically moving, comb-drive actuated micromirror are presented. A wide tuning range of 0.7 mum and a low order configuration have been achieved with a micromirror displacement range of 2.5 mum and a reduction of the optical cavity length respectively.
Keywords :
infrared detectors; micro-optomechanical devices; microcavities; micromirrors; optical resonators; MEMS micromirrors; infrared detector; mid-infrared tunable resonant cavity enhanced detectors; optical cavity length; vertically moving comb drive; Detectors; Distributed Bragg reflectors; Fingers; Geometry; Micromechanical devices; Micromirrors; Mirrors; Photodiodes; Resonance; Voltage; MEMS micromirror; Tunable RCED; infrared detector;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607885
