• DocumentCode
    2697691
  • Title

    Optical sensing of chemical compounds using porous silicon microcavities

  • Author

    Stefan, L. De ; Moretti, L. ; Rendina, I.

  • Author_Institution
    IMM, Nat. Res. Council, Naples, Italy
  • Volume
    1
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    99
  • Abstract
    Summary form only given. In this work, we present some very interesting results about the detection of chemical compounds by using porous silicon microcavities (PSMs). The microcavity is constituted by a Fabry-Perot cavity confined between two Distributed Bragg Reflectors (DBRs). When the PSM is exposed to vapors or dipped in liquid organic solvent a repeatable and completely reversible change in the reflectivity spectrum is observed. The substitution of air with organic species in the pores determines an increasing of the average refractive index of the microcavity, resulting in a marked red-shift of its characteristic peak.
  • Keywords
    Fabry-Perot resonators; chemical sensors; distributed Bragg reflectors; elemental semiconductors; microcavities; optical sensors; porous semiconductors; reflectivity; refractive index; silicon; spectrochemical analysis; Fabry-Perot cavity; Si; characteristic peak red-shift; chemical compounds; chemical sensors; distributed Bragg reflectors; microcavity refractive index; optical sensing; organic solvent; porous silicon microcavities; reflectivity spectrum; Chemical compounds; Microcavities; Optical modulation; Optical refraction; Optical sensors; Optical variables control; Reflectivity; Refractive index; Silicon; Solvents;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-7500-9
  • Type

    conf

  • DOI
    10.1109/LEOS.2002.1133937
  • Filename
    1133937