DocumentCode
2697691
Title
Optical sensing of chemical compounds using porous silicon microcavities
Author
Stefan, L. De ; Moretti, L. ; Rendina, I.
Author_Institution
IMM, Nat. Res. Council, Naples, Italy
Volume
1
fYear
2002
fDate
2002
Firstpage
99
Abstract
Summary form only given. In this work, we present some very interesting results about the detection of chemical compounds by using porous silicon microcavities (PSMs). The microcavity is constituted by a Fabry-Perot cavity confined between two Distributed Bragg Reflectors (DBRs). When the PSM is exposed to vapors or dipped in liquid organic solvent a repeatable and completely reversible change in the reflectivity spectrum is observed. The substitution of air with organic species in the pores determines an increasing of the average refractive index of the microcavity, resulting in a marked red-shift of its characteristic peak.
Keywords
Fabry-Perot resonators; chemical sensors; distributed Bragg reflectors; elemental semiconductors; microcavities; optical sensors; porous semiconductors; reflectivity; refractive index; silicon; spectrochemical analysis; Fabry-Perot cavity; Si; characteristic peak red-shift; chemical compounds; chemical sensors; distributed Bragg reflectors; microcavity refractive index; optical sensing; organic solvent; porous silicon microcavities; reflectivity spectrum; Chemical compounds; Microcavities; Optical modulation; Optical refraction; Optical sensors; Optical variables control; Reflectivity; Refractive index; Silicon; Solvents;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7500-9
Type
conf
DOI
10.1109/LEOS.2002.1133937
Filename
1133937
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