DocumentCode
2698649
Title
Formation of laterally displaced porous silicon filters using different fabrication methods
Author
Marso, M. ; Wolter, M. ; Arens-Fischer, R. ; Kordog, P. ; Lüth, H.
Author_Institution
Institut fur Schicht- und lonentechnik
fYear
2000
fDate
2000
Firstpage
95
Lastpage
98
Keywords
Etching; Finite impulse response filter; Optical device fabrication; Optical filters; Optical refraction; Optical sensors; Optical superlattices; Optical variables control; Refractive index; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Print_ISBN
0-7803-5939-9
Type
conf
DOI
10.1109/ASDAM.2000.889458
Filename
889458
Link To Document