DocumentCode :
269915
Title :
Lighthouse Plasma Instability in a Capacitive RF Discharge
Author :
Wegner, Thomas ; Küllig, Christian ; Meichsner, Jürgen
Author_Institution :
Univ. of Greifswald, Greifswald, Germany
Volume :
42
Issue :
10
fYear :
2014
fDate :
Oct. 2014
Firstpage :
2572
Lastpage :
2573
Abstract :
Instabilities in an asymmetric capacitively coupled radio frequency argon discharge occur within the pressure range of 70-100 Pa while adding low amounts of CF4. The development of these instabilities is highly dynamic in time and space. The instabilities strongly influence the optical plasma emission and electron density, respectively.
Keywords :
argon; carbon compounds; high-frequency discharges; plasma density; plasma diagnostics; plasma instability; Ar; CF4; asymmetric capacitively coupled radiofrequency argon discharge; capacitive RF discharge; electron density; lighthouse plasma instability; optical plasma emission; pressure 70 Pa to 100 Pa; Argon; Discharges (electric); Electrodes; Particle beams; Plasmas; Radio frequency; Stimulated emission; Argon radio frequency (RF) plasma; CCP; instabilities; instabilities.;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2014.2326524
Filename :
6828804
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=269915
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