Title :
Accelerated testing of RF-MEMS contact degradation through radiation sources
Author :
Tazzoli, A. ; Barbato, M. ; Giliberto, V. ; Monaco, G. ; Gerardin, S. ; Nicolosi, P. ; Paccagnella, A. ; Meneghesso, G.
Author_Institution :
Dept. of Inf. Eng., Univ. of Padova, Padova, Italy
Abstract :
This work aims to propose a novel method to accelerate the lifetime of ohmic RF-MEMS switches by means of radiation exposure. Experimental results of proton and γ-ray irradiation were compared to cycling stresses, obtaining similar degradation in electrical performances. Electrical measurements, RF simulations, and AFM analysis of surface roughness were carried out to verify the proposed method.
Keywords :
atomic force microscopy; life testing; microswitches; surface roughness; AFM analysis; RF-MEMS contact degradation; accelerated testing; radiation exposure; radiation sources; surface roughness; Acceleration; Contacts; Degradation; Electric variables measurement; Life estimation; Protons; Radio frequency; Radiofrequency microelectromechanical systems; Stress; Switches; RF-MEMS; accelerated testing; radiation;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2010 IEEE International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4244-5430-3
DOI :
10.1109/IRPS.2010.5488823
