DocumentCode
2699585
Title
CdS-CdSe thin film photoconductive cell based optoelectronic converters for higher precision measuring instrumentation
Author
Trofimov, Yu. ; Lishik, S. ; Survilo, L. ; Posedko, A. ; Sivenkov, V.
Author_Institution
Inst. of Electron., Acad. of Sci., Minsk, Byelorussia
fYear
2000
fDate
2000
Firstpage
363
Lastpage
365
Abstract
The technology of producing thin-film photoresistors based on CdS-CdSe solid solutions by the method of cathode three-electrode sputtering with RF-bias is considered. Some characteristics of thin-film photoresistors and optoelectronic convertors, and also examples of their application in high precision measuring instrumentation are given
Keywords
II-VI semiconductors; cadmium compounds; photoconductive cells; photoresistors; semiconductor thin films; signal processing equipment; sputter deposition; CdS-CdSe; CdS-CdSe solid solutions; CdS-CdSe thin film photoconductive cell based optoelectronic converters; RF-bias; cathode three-electrode sputtering; high precision measuring instrumentation; thin-film photoresistors; Cathodes; Converters; Instruments; Light emitting diodes; Optical films; Packaging; Photoconductivity; Sputtering; Transistors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Conference_Location
Smolenice
Print_ISBN
0-7803-5939-9
Type
conf
DOI
10.1109/ASDAM.2000.889521
Filename
889521
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