Characteristic analysis and simulation for electrostatic micro-cantilever

Because of its simple structure, IC compatibility, and large force output per unit energy, electrostatic micro-cantilever have been widely used in MEMS actuators. As one of main dynamic characteristics, the hysteresis process was precisely characterized and well analysed. Consequently, the application limit was obtained. Under different frequencies harmonic load shock, the mode deformations were changed and brought inaccurate action. The generalized acceleration, generalized displacement, generalized velocity, generalized angular acceleration, generalized angular, generalized angular velocity in six modes were gained in mode analyses.