Surface Sensitivity Optimization of a Microring Resonator for Biochemical Sensing

Author

Dell´Olio, Francesco ; Passaro, Vittorio M N ; De Leonardis, Francesco

Author_Institution

Dipt. di Elettrotecnica ed Elettronica, Politecnico di Bari

Volume

4

fYear

2006

fDate

18-22 June 2006

Firstpage

128

Lastpage

131

Abstract

A compact optical biosensor based on a microring resonator is proposed in this work. CMOS compatible technology based on silicon nitride deposited by low-pressure chemical vapour deposition (LPCVD) on silicon oxide has been adopted in the design. Surface sensing has been exploited, to be used in a wide range of biochemical applications, such as DNA sequencing by hybridization, antigen-antibody reactions study or pollution concentration measure in water. A semi-analytic approach supported by finite element method has been proposed to estimate and optimize the device sensitivity. Finally sensor functionality has been proved by finite difference time domain approach

Keywords

CMOS integrated circuits; DNA; biochemistry; biological techniques; chemical sensors; chemical vapour deposition; finite difference time-domain analysis; finite element analysis; integrated optics; integrated optoelectronics; micro-optics; molecular biophysics; optical resonators; optical sensors; silicon compounds; CMOS compatible technology; DNA sequencing; SiN; SiO; antigen-antibody reactions; biochemical applications; biochemical sensing; device sensitivity; finite difference time domain approach; finite element method; hybridization; low-pressure chemical vapour deposition; microring resonator; optical biosensor; pollution concentration measurement; semianalytic approach; sensor functionality; silicon nitride deposition; silicon oxide substrate; surface sensing; surface sensitivity optimization; water pollution measurement; Biomedical optical imaging; Biosensors; CMOS technology; Chemical technology; Chemical vapor deposition; DNA; Optical resonators; Optical sensors; Silicon; Surface contamination; microring resonators; optical biosensors; surface sensing;

fLanguage

English

Publisher

ieee

Conference_Titel

Transparent Optical Networks, 2006 International Conference on

Conference_Location

Nottingham

Print_ISBN

1-4244-0235-2

Electronic_ISBN

1-4244-0236-0

Type

conf

DOI

10.1109/ICTON.2006.248516

Filename

4013876