Title :
A Micro Step Structures Motion Of Polysilicon On Silicon Substrate
Author :
Zhu, Junqi ; Akiyama, Terunobu ; Shono, Katsufusa
Keywords :
Blades; CMOS process; CMOS technology; Dry etching; Fabrication; Insulators; Microstructure; Silicon; Substrates; Wet etching;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639359
