Title :
Accurate model of the dynamic response of a capacitive humidity sensor
Author :
Tetelin, Angelique ; Pellet, Claude
Author_Institution :
CNRS UMR, Bordeaux Univ., Talence, France
Abstract :
This paper presents a model simulating the transient response of a capacitive humidity sensor made of a polymer sensitive film. The model is based on the theory of molecule diffusion in polymer films. The confrontation of this model with finite element simulation and experimental results demonstrates its accuracy. This model could be implemented in a microprocessor for data extraction.
Keywords :
capacitive sensors; finite element analysis; humidity sensors; polymer films; simulation; capacitive sensor; data extraction; finite element simulation; humidity sensor; microprocessor; molecule diffusion; polymer films; sensor modeling; transient response; Bars; Capacitance; Capacitive sensors; Chemical sensors; Electrodes; Humidity; Polymers; Sensor phenomena and characterization; Temperature sensors; Transient response;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1278962
