Title :
Nonvolatile Memory Based On Reversible Phase Transition In Chalcogenide Semiconductor Thin Film
Author :
Nakayama, Kazuya ; Kitagawa, Toshiya ; Hashimoto, Kazunari ; Ohtuka, Keisuke ; Kitagawa, Akio ; Suzuki, Masakuni
Keywords :
Amorphous semiconductors; Buffer layers; Crystalline materials; Crystallization; Electric resistance; Electrodes; Nonvolatile memory; Semiconductor films; Semiconductor thin films; Tellurium;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639363