• DocumentCode
    2703313
  • Title

    The study of ZnO/XY LiNbO3 layered SAW devices for sensing applications

  • Author

    Ippolito, S.J. ; Kalantar-Zadeh, K. ; Wlodarski, W. ; Matthews, G.I.

  • Author_Institution
    Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia
  • Volume
    1
  • fYear
    2003
  • fDate
    22-24 Oct. 2003
  • Firstpage
    539
  • Abstract
    In this paper a study of layered surface acoustic wave (SAW) devices based on a ZnO/XY LiNbO3 structure is presented. A 3-dimensional finite-element (3D-FE) approach has been applied to simulate device performance. Particle displacement profiles in depth and beam steering are presented. Furthermore, electrical interaction of the device to a modeled gas interaction is investigated. A comparison with experimental results is used to illustrate the accuracy of the model.
  • Keywords
    finite element analysis; lithium compounds; surface acoustic wave sensors; zinc compounds; 3D finite-element approach; ZnO-LiNbO3; beam steering; depth displacement; device performance; electrical interaction; gas interaction; layered SAW devices; particle displacement profiles; sensing applications; surface acoustic wave devices; Acoustic waves; Analytical models; Application software; Australia; Beam steering; Fingers; Surface acoustic wave devices; Surface waves; Voltage; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2003. Proceedings of IEEE
  • Print_ISBN
    0-7803-8133-5
  • Type

    conf

  • DOI
    10.1109/ICSENS.2003.1278996
  • Filename
    1278996
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2703313