Title :
The study of ZnO/XY LiNbO3 layered SAW devices for sensing applications
Author :
Ippolito, S.J. ; Kalantar-Zadeh, K. ; Wlodarski, W. ; Matthews, G.I.
Author_Institution :
Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia
Abstract :
In this paper a study of layered surface acoustic wave (SAW) devices based on a ZnO/XY LiNbO3 structure is presented. A 3-dimensional finite-element (3D-FE) approach has been applied to simulate device performance. Particle displacement profiles in depth and beam steering are presented. Furthermore, electrical interaction of the device to a modeled gas interaction is investigated. A comparison with experimental results is used to illustrate the accuracy of the model.
Keywords :
finite element analysis; lithium compounds; surface acoustic wave sensors; zinc compounds; 3D finite-element approach; ZnO-LiNbO3; beam steering; depth displacement; device performance; electrical interaction; gas interaction; layered SAW devices; particle displacement profiles; sensing applications; surface acoustic wave devices; Acoustic waves; Analytical models; Application software; Australia; Beam steering; Fingers; Surface acoustic wave devices; Surface waves; Voltage; Zinc oxide;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1278996
