DocumentCode
2703435
Title
Optical MCM interconnect using hybrid integration of GaAs optoelectronics with a glass signal routing layer
Author
Twyford, Elizabeth J. ; Chen, Junfu ; Jokerst, N.M. ; Hartman, Nile F.
Author_Institution
Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
fYear
1995
fDate
21-24 May 1995
Firstpage
770
Lastpage
776
Abstract
In this paper, we present a MCM chip to chip optical interconnect layer in which optoelectronic devices are integrated onto a glass light-guiding substrate. Rather than solder bump bonding, we used the epitaxial lift-off technique for optoelectronic integration. This integration technique facilitates mixed material integration, so that we are able to choose the most cost effective and high performance material for each function in the integration. We report successful integration of emitters and detectors onto a glass substrate, demonstrating that thin-film epitaxial lift-off technology is compatible with the proposed optical interconnect system. An optical interconnection is demonstrated in which light propagating, in both a waveguide mode and substrate modes is routed by a grating to the receiving photodetector
Keywords
integrated circuit packaging; integrated optoelectronics; multichip modules; network routing; optical interconnections; GaAs; chip to chip interconnect layer; glass signal routing layer; hybrid integration; light-guiding substrate; mixed material integration; optical MCM interconnect; substrate mode; thin-film epitaxial lift-off technology; waveguide mode; Bonding; Cost function; Gallium arsenide; Glass; Integrated optics; Optical interconnections; Optical materials; Optical waveguides; Optoelectronic devices; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 1995. Proceedings., 45th
Conference_Location
Las Vegas, NV
Print_ISBN
0-7803-2736-5
Type
conf
DOI
10.1109/ECTC.1995.517773
Filename
517773
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