High temperature SAW gas sensor on langasite

Author

Thiele, J.A. ; da Cunha, M. Pereira

Author_Institution

Dept. of Electr. & Comput. Eng., Maine Univ., Orono, ME, USA

Volume

2

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

769

Abstract

Novel Surface Acoustic Wave (SAW) devices using the new langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750°C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology and were mounted in a high temperature sealed stainless steel chamber for gas testing. The high temperature SAW sensors have been exposed to temperatures from 250°C to 750°C and cycled more than ten times in that temperature range over periods from two to six weeks. Gas sensing of C₂H₄ in N₂ and H₂ in N₂ with baselines of O₂ and N₂ on the LGS SAW devices has been performed from 250°C to 550°C and is reported for the first time in this paper.

Keywords

gas sensors; hydrogen; organic compounds; oxygen; surface acoustic wave sensors; 250 to 550 degC; 250 to 750 degC; 750 degC; H₂; N₂; O₂; high temperature SAW gas sensor; langasite; Acoustic testing; Acoustic waves; Crystals; Gas detectors; Palladium; Platinum; Surface acoustic wave devices; Surface acoustic waves; Temperature distribution; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1279045

Filename

1279045