Title :
Miniaturized LIGA Fourier transformation spectrometer
Author :
Solf, Christian ; Mohr, Jurgen ; Wallrabe, Ulrike
Author_Institution :
Inst. fur Mikrostrukturtech., Forschungszentrum Karlsruhe, Germany
Abstract :
We have developed a miniaturized Fourier Transformation Spectrometer (FTS). The spectrometer is designed for application in the near infrared spectrum and can be used for the qualitative and quantitative analysis of liquid, solid or gaseous substances. Our FTS is basically a Michelson Interferometer that consists of an optical bench for the passive alignment of the optical components with an integrated electromechanical actuator. All parts such as the collimation optics, the detectors and the actuator are assembled on a chip. The system was manufactured using the LIGA technology.
Keywords :
Fourier transform spectrometers; LIGA; Michelson interferometers; micro-optics; optical elements; Michelson Interferometer; miniaturized LIGA Fourier transformation spectrometer; near infrared spectrum; optical bench; optical components; passive alignment; qualitative analysis; quantitative analysis; Actuators; Assembly; Infrared spectra; Integrated optics; Optical collimators; Optical detectors; Optical devices; Optical interferometry; Solids; Spectroscopy;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1279046
