A sigma-delta digital oscillator for MEMS

Author

Dominguez, Manuel ; Pons, Joan ; Ricart, Jordi ; Bermejo, Agustin

Author_Institution

Dept. d´´Enginyeria Elettronica, Univ. Politecnica de Catalunya, Barcelona, Spain

Volume

2

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

834

Abstract

A novel digital oscillator for MEMS, based on bandpass sigma-delta modulation is presented. Short pulses of force of the same amplitude maintain the oscillation and their associated bit-stream output serves to know the oscillation frequency of the resonator, which for low mechanical losses is very close to the natural frequency. Position sensing requirements are extremely simplified because at each sampling time it is only necessary to know whether the resonator position is above or below the steady state position. Continuous-time simulations are presented which show the behavior of the oscillator for a reference MEMS resonator and different sampling frequencies.

Keywords

crystal oscillators; micromechanical resonators; sigma-delta modulation; MEMS; amplitude; associated bit-stream output; bandpass sigma-delta modulation; continuous-time simulations; low mechanical losses; natural frequency; oscillation; oscillation frequency; resonator; sigma-delta digital oscillator; Actuators; Delta-sigma modulation; Frequency; Micromechanical devices; Oscillators; Pulse amplifiers; Q factor; Sampling methods; Signal design; Strain measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1279060

Filename

1279060