DocumentCode
2704414
Title
Novel readout electronics for TSM viscosity sensors
Author
Jakoby, B. ; Art, G. ; Bastemeijer, J.
Author_Institution
Ind. Sensor Syst., Vienna Univ. of Technol., Austria
Volume
2
fYear
2003
fDate
22-24 Oct. 2003
Firstpage
839
Abstract
In this contribution, we describe a novel electronic readout circuit for TSM resonators, which can be used, e.g., for viscosity sensing in liquids. In contrast to conventionally utilized oscillator circuits, the present circuit eliminates the disturbing influence of the static capacitance of the sensor by means of a synchronous detector. The sensor is externally fed by a voltage controlled oscillator, which is tuned to the fundamental resonance frequency by means of a control circuit utilizing a frequency modulation of the VCO signal. When the control loop has settled, either the obtained resonance frequency or the damping of the sensor can be used as output signals providing a measure for the viscosity.
Keywords
micromechanical resonators; microsensors; readout electronics; shear flow; viscosity measurement; voltage-controlled oscillators; TSM viscosity sensors; VCO signal; control loop; damping; frequency modulation; readout electronics; resonance frequency; static capacitance; synchronous detector; voltage controlled oscillator; Capacitance; Capacitive sensors; Circuits; Detectors; Liquids; Readout electronics; Resonance; Resonant frequency; Viscosity; Voltage-controlled oscillators;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2003. Proceedings of IEEE
Print_ISBN
0-7803-8133-5
Type
conf
DOI
10.1109/ICSENS.2003.1279061
Filename
1279061
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