• DocumentCode
    2704414
  • Title

    Novel readout electronics for TSM viscosity sensors

  • Author

    Jakoby, B. ; Art, G. ; Bastemeijer, J.

  • Author_Institution
    Ind. Sensor Syst., Vienna Univ. of Technol., Austria
  • Volume
    2
  • fYear
    2003
  • fDate
    22-24 Oct. 2003
  • Firstpage
    839
  • Abstract
    In this contribution, we describe a novel electronic readout circuit for TSM resonators, which can be used, e.g., for viscosity sensing in liquids. In contrast to conventionally utilized oscillator circuits, the present circuit eliminates the disturbing influence of the static capacitance of the sensor by means of a synchronous detector. The sensor is externally fed by a voltage controlled oscillator, which is tuned to the fundamental resonance frequency by means of a control circuit utilizing a frequency modulation of the VCO signal. When the control loop has settled, either the obtained resonance frequency or the damping of the sensor can be used as output signals providing a measure for the viscosity.
  • Keywords
    micromechanical resonators; microsensors; readout electronics; shear flow; viscosity measurement; voltage-controlled oscillators; TSM viscosity sensors; VCO signal; control loop; damping; frequency modulation; readout electronics; resonance frequency; static capacitance; synchronous detector; voltage controlled oscillator; Capacitance; Capacitive sensors; Circuits; Detectors; Liquids; Readout electronics; Resonance; Resonant frequency; Viscosity; Voltage-controlled oscillators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2003. Proceedings of IEEE
  • Print_ISBN
    0-7803-8133-5
  • Type

    conf

  • DOI
    10.1109/ICSENS.2003.1279061
  • Filename
    1279061