Title :
Area array solder interconnection technology for the three-dimensional silicon cube
Author :
Howell, Wayne J. ; Brouillette, Donald W. ; Konejwa, J.W. ; Sprogis, Edmund J. ; Yankee, Sally J. ; Wursthorn, J.M.
Author_Institution :
IBM Microelectron. Div., Essex Junction, VT, USA
Abstract :
Area array solder interconnection technology has been successfully implemented on three-dimensional (3-D) silicon cubes. The 3-D semiconductor components are fabricated using silicon-cube technology. Multiple integrated circuit chips are stacked, laminated and interconnected, creating a fast ultra-high-density component. Critical to realizing these advantages is the use of area array solder-bump interconnection, with its high I/O density, to first-level packaging. Several technology challenges have been addressed in successfully and reliably implementing area array interconnections. The 3-D ultra-high-density component, with its composite structure, is large, can have different thermal expansion coefficients in the two axes defining the solder-bump interconnection plane and dynamic thermal gradients throughout the structure. This paper presents the silicon-cube technology, discusses the inherent area array solder-bump interconnection challenges and reviews the implementation and qualification results
Keywords :
integrated circuit interconnections; integrated circuit packaging; silicon; soldering; Si; area array solder-bump; composite structure; dynamic thermal gradients; fabrication; interconnection technology; multiple integrated circuit chip; packaging; semiconductor components; thermal expansion coefficients; three-dimensional silicon cubes; ultra-high-density components; Ceramics; Fabrication; Integrated circuit interconnections; Integrated circuit technology; Semiconductor device packaging; Sensor arrays; Silicon; Sputtering; Substrates; Thermal expansion;
Conference_Titel :
Electronic Components and Technology Conference, 1995. Proceedings., 45th
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-7803-2736-5
DOI :
10.1109/ECTC.1995.517839