Title :
1990 Symposium on VLSI Technology. Digest of Technical Papers [Front Cover]
Abstract :
Presents the front cover from the conference proceedings.
Keywords :
VLSI; integrated circuit technology; lithography; metallisation; semiconductor technology; sputter etching; BiCMOS; CAM; CMOS technologies; DRAM; MOS device technologies; MOS reliability; SOI integration technologies; ULSI; VLSI interconnects; VLSI technology; bipolar transistor technologies; computer-aided manufacture; conference; deposition; dry etching; high-density dynamic RAM; interconnect reliability; lithography; nonvolatile memory technologies; planarization; process control; thin dielectrics;
Conference_Titel :
VLSI Technology, 1990. Digest of Technical Papers.1990 Symposium on
Conference_Location :
Honolulu, Hawaii, USA
DOI :
10.1109/VLSIT.1990.110970
