• DocumentCode
    2705198
  • Title

    Design and Fabrication of a Novel Micro Angle Sensor

  • Author

    Sayyaf, N. ; Barazandeh, F. ; Nejad, S. Nazari ; Razfar, M.R.

  • Author_Institution
    Dept. of Mech. Eng., Amirkabir Univ. of Technol., Tehran, Iran
  • fYear
    2009
  • fDate
    28-30 Dec. 2009
  • Firstpage
    37
  • Lastpage
    40
  • Abstract
    A novel angle sensor which works based on Lorentz force and capacitors is presented. The structure consists of two bending beams and the angle will expose by displacement of the beams. The bulk micromachining technology is employed to fabricate the sensor on silicon substrate. The suggested micro angle sensor is accurate and contactless.
  • Keywords
    Capacitance; Capacitive sensors; Capacitors; Fabrication; Magnetic field measurement; Magnetic materials; Magnetic sensors; Mechanical sensors; Micromachining; Pollution measurement; Hall Effect; MEMS; Microfabrication; bulk micromachining; micro angle sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO, and Smart Systems (ICMENS), 2009 Fifth International Conference on
  • Conference_Location
    Dubai, United Arab Emirates
  • Print_ISBN
    978-0-7695-3938-6
  • Electronic_ISBN
    978-1-4244-5616-1
  • Type

    conf

  • DOI
    10.1109/ICMENS.2009.12
  • Filename
    5489258
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2705198