Title :
Novel p-type gas sensing thin film based on Nb-Ti-O mixed oxides
Author :
Comini, E. ; Sberveglieri, G. ; Ferroni, M. ; Polizzi, S. ; Guidi, V. ; Martinelli, G.
Author_Institution :
Chem. & Phys. Dept., Brescia Univ., Italy
Abstract :
Thin films with variable concentrations of niobium and titanium mixed oxides have been achieved by reactive sputtering process and p-type sensing layers have been achieved. Structural and morphological studies have been carried out by means of SEM, TEM and AFM in order to understand the measurement of sensing performance. The films proved sensitive to ethanol and carbon monoxide. It was also shown that annealing temperature and niobium content strongly influence the gas response of the films leading from n-type response typical of TiO2 and the most of metal oxide sensors to p-type response and this peculiarity is crucial for the discrimination of different gases.
Keywords :
atomic force microscopy; carbon compounds; gas sensors; grain size; niobium compounds; organic compounds; scanning electron microscopy; semiconductor thin films; sputtered coatings; titanium compounds; transmission electron microscopy; AFM; CO; Nb-Ti-O mixed oxides; Nb2O3-TiO2; SEM; TEM; annealing temperature; ethanol; gas response; p-type gas sensing thin film; reactive sputtering process; variable concentrations; Annealing; Ethanol; Gas detectors; Gases; Lead compounds; Niobium; Sputtering; Temperature sensors; Titanium; Transistors;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1279117
