Title :
Two-dimensional charge carrier systems for chemical sensors: AlGaN/GaN and diamond
Author :
Stutzmann, M. ; Garrido, Jose Antonio ; Eickhoff, M.
Author_Institution :
Walter Schottky Inst., Garching, Germany
Abstract :
The use of spontaneously formed two-dimensional electron and hole gases at AlGaN/GaN hetero-interfaces and at the surface of hydrogen-terminated diamond for novel sensor devices is reviewed. The physical origin of these two-dimensional carrier systems is briefly described and recent results concerning their interaction with ions and gases are outlined In both cases, a controlled oxidation of the exposed surface turns out to be important for an optimum sensor operation.
Keywords :
III-V semiconductors; aluminium compounds; chemical sensors; diamond; elemental semiconductors; gallium compounds; oxidation; two-dimensional electron gas; two-dimensional hole gas; wide band gap semiconductors; AlGaN-GaN; AlGaN/GaN; C; chemical sensors; controlled oxidation; diamond; exposed surface; two-dimensional charge carrier systems; two-dimensional electron gases; two-dimensional hole gases; Aluminum gallium nitride; Charge carrier processes; Charge carriers; Chemical sensors; Control systems; Gallium nitride; Gases; Oxidation; Sensor phenomena and characterization; Sensor systems;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1279125