DocumentCode :
2705829
Title :
A solid-state hydrocarbon sensor for environmental applications
Author :
Gurbuz, Y. ; Kang, W.P. ; Davidson, J.L. ; Kerns, D.V.
Author_Institution :
Fac. of Eng. & Natural Sci., Sabanci Univ., Istanbul, Turkey
Volume :
2
fYear :
2003
fDate :
22-24 Oct. 2003
Firstpage :
1159
Abstract :
We have applied CVD (chemical vapor deposition) diamond chemical sensor to detect benzene and toluene, volatile organic compounds, possible indication of the existence of environmental hazardous and petroleum in soil/subsoil. Steady-state and transient response of the sensor for both gases have been extensively studied. These studies have shown that the sensor shows a large sensitivity, fast response, high selectivity, large dynamic range, repeatable/reproducible response for the detection of benzene and toluene gases. Activation energy analysis of the sensor for both gases resulted very small values, confirming fast response and high selectivity.
Keywords :
CVD coatings; diamond; elemental semiconductors; gas sensors; organic compounds; semiconductor thin films; soil pollution; C; CVD; benzene; chemical vapor deposition; environmental applications; environmental hazardous materials; fast response; high selectivity; large dynamic range; large sensitivity; petroleum; repeatable/reproducible response; soil; solid-state hydrocarbon sensor; steady-state response; subsoil; toluene; transient response; volatile organic compounds; Chemical sensors; Chemical vapor deposition; Gas detectors; Gases; Hydrocarbons; Petroleum; Soil; Solid state circuits; Steady-state; Volatile organic compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
Type :
conf
DOI :
10.1109/ICSENS.2003.1279126
Filename :
1279126
Link To Document :
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