Integrated CMOS surface acoustic wave gas sensor: design and characteristics

Author

Hassani, Farid ; Tigli, Onur ; Ahmadi, Shahrokh ; Korman, Can ; Zaghloul, Mona

Author_Institution

Dept. of Electr. & Comput. Eng., George Washington Univ., DC, USA

Volume

2

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

1199

Abstract

The development of inexpensive and miniaturized Surface Acoustics Wave (SAW) gas sensors that are highly selective and sensitive is described. These sensors are implemented with micro-electro-mechanical systems (MEMS) in CMOS technology. IDT equivalent circuit and model for SAW delay line is introduced. Simulation results are included for characterization and design of the sensor. In this paper we will describe the design and post-processing steps to implement SAW device in CMOS technology. Design parameters of this device were obtained using modeling equivalent circuit to characterize sensor. Two approaches were used in the design of the SAW gas sensor that will be discussed. A CMOS chip was fabricated using MOSIS. Thin film ZnO was grown on Silicon based die and its characterizations is presented.

Keywords

CMOS integrated circuits; equivalent circuits; gas sensors; micromechanical devices; microsensors; semiconductor device models; surface acoustic wave sensors; IDT equivalent circuit; SAW delay line; highly selective; integrated CMOS surface acoustic wave gas sensor; micro-electro-mechanical systems; model; sensitive; Acoustic sensors; Acoustic waves; CMOS technology; Equivalent circuits; Gas detectors; Microelectromechanical systems; Semiconductor device modeling; Sensor phenomena and characterization; Sensor systems; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1279135

Filename

1279135