• DocumentCode
    2706495
  • Title

    A microstructure semiconductor thermocouple for microwave power sensors

  • Author

    Chen Deyong ; Cui Dafu ; Han Jinghong ; Chen Shaofeng ; Li, Wang ; Zigao, Li ; Binxiang, Fu

  • Author_Institution
    Inst. of Electron., Acad. Sinica, Beijing, China
  • Volume
    3
  • fYear
    1997
  • fDate
    2-5 Dec 1997
  • Firstpage
    917
  • Abstract
    By using standard silicon planar process, combined with an anisotropically etch technology, a microstructure Si-Ta2N thermocouple for microwave power sensors has been fabricated. The sensor has a sensitivity as high as 200 μV/mW over a frequency range of 10 MHz to 18 GHz at a power level from 1 μW to 100 mW
  • Keywords
    elemental semiconductors; etching; microwave detectors; power measurement; silicon; tantalum compounds; thermocouples; 1 muW to 100 mW; 10 MHz to 18 GHz; Si-Ta2N; anisotropic etching; microstructure semiconductor thermocouple; microwave power sensor; silicon planar process; Anisotropic magnetoresistance; Frequency; Microstructure; Microwave sensors; Power measurement; Silicon; Sputter etching; Temperature sensors; Thermal sensors; Thermistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference Proceedings, 1997. APMC '97, 1997 Asia-Pacific
  • Print_ISBN
    962-442-117-X
  • Type

    conf

  • DOI
    10.1109/APMC.1997.656348
  • Filename
    656348
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2706495