Design optimization and validity simulation for the support structure of the segment deformable mirror

How to design the best support structure of the segment deformable mirror (DM) to ensure the high dynamic stiffness, which is very significant for the image system of the MOEMS (micro-opto-electro-mechanical systems). Based on the finite element analysis and neutral network, this article presents an optimization design method for the segment DM support structure. The modal analysis is implemented by the finite element software ANSYS. And the structure parameters of the support structure are optimized with the methods of orthogonal experiment, BP neural network and genetic algorithm (GA). The validity simulation of the optimization is verified by the analyses of the random vibration, harmonic response and fatigue life. It proves that the optimization method adopted in this article is effective to improve the performance of the segment DM support structure.