Substrate pump NMOS for ESD protection applications

Author

Duvvury, Charvaka ; Ramaswamy, Sridhar ; Amerasekera, Ajith ; Cline, Roger A. ; Andresen, Bernhard H. ; Gupta, Vikas

Author_Institution

Texas Instrum. Inc., Dallas, TX, USA

fYear

2000

fDate

26-28 Sept. 2000

Firstpage

7

Lastpage

17

Abstract

The use of a substrate pump to achieve uniform npn protection in a multi-finger NMOS is reported for advanced CMOS technologies with silicide. The novel feature of this device technique is the implementation of a floating guardring to effectively pump the local substrate of the protection NMOS. SPICE simulations are presented to illustrate the device concept as well as the device design optimization.

Keywords

CMOS integrated circuits; MOSFET; SPICE; circuit simulation; electrostatic discharge; integrated circuit modelling; integrated circuit reliability; optimisation; protection; CMOS technologies; ESD protection applications; SPICE simulation; device design optimization; device technique; floating guardring; local substrate pumping; multi-finger NMOS; protection NMOS; silicide; substrate pump; substrate pump NMOS; uniform npn protection; CMOS technology; Circuits; Diodes; Electrostatic discharge; MOS capacitors; MOS devices; Protection; Resistors; Robustness; Silicides;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000

Conference_Location

Anaheim, CA, USA

Print_ISBN

1-58537-018-5

Type

conf

DOI

10.1109/EOSESD.2000.890022

Filename

890022