Title :
Comparison and correlation of ESD HBM (human body model) obtained between TLPG, wafer-level, and package-level tests
Author :
Lee, Ming T. ; Liu, Chuan H. ; Lin, Chung-Chiang ; Chou, Jin-Tau ; Tang, Howard T H ; Chang, Yih J. ; Fu, K.Y.
Author_Institution :
United Microelectron. Corp., Hsinchu, Taiwan
Abstract :
In this work, we have found that the TLPG (transmission line pulse generator) can be well correlated to the HBM by adding a parasitic series resistance obtained simply from the least squares error solution method or numerically from a simplified LEM (lumped element model) method. Also, experimental evidence suggests that the HBM is best described by the log normal distribution rather than the normal distribution.
Keywords :
electrostatic discharge; integrated circuit modelling; integrated circuit packaging; integrated circuit testing; least squares approximations; log normal distribution; transmission lines; ESD HBM; HBM; TLPG; TLPG tests; human body model; least squares error solution method; log normal distribution; lumped element model; normal distribution; package-level tests; parasitic series resistance; simplified LEM; transmission line pulse generator; wafer-level tests; Biological system modeling; Circuit testing; Electrostatic discharge; Gaussian distribution; Humans; Immune system; Least squares methods; MOSFETs; Packaging; Semiconductor device modeling;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-58537-018-5
DOI :
10.1109/EOSESD.2000.890033