DocumentCode
2708282
Title
Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications
Author
Matvejev, V. ; De Tandt, C. ; Ranson, W. ; Stiens, J.
Author_Institution
Lab. of Micro- & Photoelectron., Vrije Univ. Brussel, Brussels, Belgium
fYear
2010
fDate
5-10 Sept. 2010
Firstpage
1
Lastpage
2
Abstract
Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.
Keywords
micromachining; microsensors; terahertz wave detectors; waveguides; Si; hexagonally shaped waveguide; loss mitigation; low loss integrated sensor applications; operational frequency band; wet silicon bulk micromachined waveguides; Attenuation; Electromagnetic waveguides; Etching; Micromachining; Rough surfaces; Silicon; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location
Rome
Print_ISBN
978-1-4244-6655-9
Type
conf
DOI
10.1109/ICIMW.2010.5612337
Filename
5612337
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