Title :
A Plastic W-Band MEMS Tunable Filter
Author :
Sammoura, Firas ; Lin, Liwei
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA
Abstract :
A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry for frequency tuning. Prototype filter has been fabricated and measured with bandwidth of 4.05GHz centered at 94.79GHz with a minimum insertion loss of 2.37dB and return loss better than 15dB. A total of 2.59GHz center frequency shift has been achieved when membranes deflect from -50mum to +150mum
Keywords :
electroplating; embossing; micromechanical devices; millimetre wave filters; plastics; 4.05 GHz; 94.79 GHz; MEMS-based process; W-band MEMS tunable filter; built-in deformable membranes; gold electroplating; insertion loss; movable membranes; plastic microembossing process; return loss; two-cavity iris filter; Biomembranes; Embossing; Filters; Frequency; Geometry; Gold; Iris; Micromechanical devices; Plastics; Tuning; Bandpass filters; microelectromechanical devices; millimeter wave waveguides; plastics; tunable filters;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249413
