A Plastic W-Band MEMS Tunable Filter

Author

Sammoura, Firas ; Lin, Liwei

Author_Institution

Dept. of Mech. Eng., California Univ., Berkeley, CA

fYear

2006

fDate

11-16 June 2006

Firstpage

136

Lastpage

139

Abstract

A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry for frequency tuning. Prototype filter has been fabricated and measured with bandwidth of 4.05GHz centered at 94.79GHz with a minimum insertion loss of 2.37dB and return loss better than 15dB. A total of 2.59GHz center frequency shift has been achieved when membranes deflect from -50mum to +150mum

Keywords

electroplating; embossing; micromechanical devices; millimetre wave filters; plastics; 4.05 GHz; 94.79 GHz; MEMS-based process; W-band MEMS tunable filter; built-in deformable membranes; gold electroplating; insertion loss; movable membranes; plastic microembossing process; return loss; two-cavity iris filter; Biomembranes; Embossing; Filters; Frequency; Geometry; Gold; Iris; Micromechanical devices; Plastics; Tuning; Bandpass filters; microelectromechanical devices; millimeter wave waveguides; plastics; tunable filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2006. IEEE MTT-S International

Conference_Location

San Francisco, CA

ISSN

0149-645X

Print_ISBN

0-7803-9541-7

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2006.249413

Filename

4014840