Title :
Design of low-loss distributed MEMS phase shifter
Author :
Ai-xin Chen ; Ying Li
Author_Institution :
EMC Lab., Beijing Univ. of Aeronaut. & Astronaut., Beijing, China
Abstract :
An 90° and an 180° wide-band distributed MEMS transmission line phase shifters are designed respectively on a 500 ¿m sillion substrate for Ka-band in this documents. Both with the insert loss lower than -0.38 dB and -0.41 dB, and the return loss less than -10 dB. The final phase shift are 89.51° for 90° phase shifter and 176.09° for 180° phase shfter.
Keywords :
broadband networks; micromechanical devices; phase shifters; silicon; Ka-band; Si; insert loss; low-loss distributed MEMS; return loss; size 500 mum; transmission line phase shifters; wide-band distributed; Bridge circuits; Capacitance; Coplanar waveguides; Impedance; Micromechanical devices; Microswitches; Phase shifters; Power transmission lines; Radiofrequency microelectromechanical systems; Wideband; Distributed; MEMS; Phase Shifter;
Conference_Titel :
Microwave, Antenna, Propagation and EMC Technologies for Wireless Communications, 2009 3rd IEEE International Symposium on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-4076-4
DOI :
10.1109/MAPE.2009.5355905
