Title :
Development of MEMS microbolometer detector for THz applications
Author :
Oulachgar, H. ; Marchese, L. ; Alain, C. ; Topart, P. ; Tremblay, B. ; Ilias, S. ; Bolduc, M. ; Williamson, F. ; Baldenberger, G. ; Genereux, F. ; Osouf, J. ; Le Noc, L. ; Pope, T. ; Jerominek, H. ; Bergeron, A.
Author_Institution :
Inst. Nat. d´´Opt. (INO), Quebec City, QC, Canada
Abstract :
INO has been actively working on extending its microbolometer technology to THz applications. Several techniques have been developed recently to improve the performance of the microbolometer. This article will present these techniques and discuss some potential applications of INO THz microbolometer.
Keywords :
bolometers; microsensors; terahertz wave detectors; INO THz microbolometer; MEMS microbolometer detector; Absorption; Bolometers; Detectors; Films; Frequency selective surfaces; Gold;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612408
