• DocumentCode
    2709582
  • Title

    Development of MEMS microbolometer detector for THz applications

  • Author

    Oulachgar, H. ; Marchese, L. ; Alain, C. ; Topart, P. ; Tremblay, B. ; Ilias, S. ; Bolduc, M. ; Williamson, F. ; Baldenberger, G. ; Genereux, F. ; Osouf, J. ; Le Noc, L. ; Pope, T. ; Jerominek, H. ; Bergeron, A.

  • Author_Institution
    Inst. Nat. d´´Opt. (INO), Quebec City, QC, Canada
  • fYear
    2010
  • fDate
    5-10 Sept. 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    INO has been actively working on extending its microbolometer technology to THz applications. Several techniques have been developed recently to improve the performance of the microbolometer. This article will present these techniques and discuss some potential applications of INO THz microbolometer.
  • Keywords
    bolometers; microsensors; terahertz wave detectors; INO THz microbolometer; MEMS microbolometer detector; Absorption; Bolometers; Detectors; Films; Frequency selective surfaces; Gold;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-6655-9
  • Type

    conf

  • DOI
    10.1109/ICIMW.2010.5612408
  • Filename
    5612408
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2709582