Cross-Contamination Control at MIT´s Microsystems Technology Labs

Author

Diadiuk, Vicky

Author_Institution

Massachusetts Inst. of Technol., Cambridge, MA, USA

fYear

2012

fDate

9-10 July 2012

Firstpage

1

Lastpage

1

Abstract

The mission of the Microsystems Technology Labs (MTL) is to provide facilities for education and research in micro and nano technology and innovative devices. MTL´s research program is interdisciplinary, including students and faculty from most of the academic departments and research centers in MIT´s Schools of Engineering and Science. In addition, MTL welcomes scientists and engineers from its sponsoring companies and, through its fabrication Facilities Access Program (FFA) includes engineers from companies who wish to make use of the MTL fabs for prototype development. Through its Outreach Program, MTL welcomes researchers from other universities and government labs.

Keywords

educational institutions; laboratories; micromechanical devices; nanotechnology; FFA; Facilities Access Program; MIT Microsystems Technology Labs; MIT Schools of Engineering and Science; Outreach Program; academic departments; cross-contamination control; education; engineers; facilities; faculty; government labs; innovative devices; microtechnology; nanotechnology a; prototype development; research centers; research program; scientists; sponsoring companies; students; universities; Companies; Educational institutions; Fabrication; Materials; Nanoscale devices; Prototypes;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial

Conference_Location

Berkeley, CA

ISSN

0749-6877

Print_ISBN

978-1-4577-1751-2

Electronic_ISBN

0749-6877

Type

conf

DOI

10.1109/UGIM.2012.6247065

Filename

6247065