In Search of the Perfect "Core" Nano Facility: Trends in Research Cleanroom and Imaging Lab Design

Author

Gregg, A.

fYear

2012

fDate

9-10 July 2012

Firstpage

1

Lastpage

1

Abstract

AGI will present recent benchmarking of nanotechnology and multidisciplinary cleanrooms and imaging labs, explaining emerging trends including common tool lists, the latest “must have” process and metrology tools, size/configuration trends in cleanrooms and imaging spaces, and trends in accommodation of shared toolset expansion over time (phasing plans). We will also cover architectural/site planning considerations, and the increasing complexity of imaging lab environments, especially in urban settings. Design considerations that are critical to research environments, regardless of specific process, will be discussed, along with their cost drivers.

Keywords

design engineering; nanotechnology; planning; production facilities; AGI; architectural-site planning; cost drivers; imaging lab design; multidisciplinary cleanrooms; nanotechnology; perfect core nano facility; research cleanroom; research environments; urban settings; Abstracts; Benchmark testing; Imaging; Laboratories; Metrology; Nanotechnology; Planning;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial

Conference_Location

Berkeley, CA

ISSN

0749-6877

Print_ISBN

978-1-4577-1751-2

Electronic_ISBN

0749-6877

Type

conf

DOI

10.1109/UGIM.2012.6247072

Filename

6247072