Abstract :
AGI will present recent benchmarking of nanotechnology and multidisciplinary cleanrooms and imaging labs, explaining emerging trends including common tool lists, the latest “must have” process and metrology tools, size/configuration trends in cleanrooms and imaging spaces, and trends in accommodation of shared toolset expansion over time (phasing plans). We will also cover architectural/site planning considerations, and the increasing complexity of imaging lab environments, especially in urban settings. Design considerations that are critical to research environments, regardless of specific process, will be discussed, along with their cost drivers.
Keywords :
design engineering; nanotechnology; planning; production facilities; AGI; architectural-site planning; cost drivers; imaging lab design; multidisciplinary cleanrooms; nanotechnology; perfect core nano facility; research cleanroom; research environments; urban settings; Abstracts; Benchmark testing; Imaging; Laboratories; Metrology; Nanotechnology; Planning;
