Title :
XPS study of gas sensitive SnO2 thin films
Author :
Brinzari, V. ; Korotchenkov, G. ; Veltruska, K. ; Matolin, V. ; Tsud, N. ; Schwank, J.
Author_Institution :
Dept. of Microelectron., Tech. Univ. of Moldova, Chisinau, Moldova
Abstract :
SnO2 is a dominant material in production of solid state gas sensors. However, till now the nature and forms of chemisorbed species on its surface remain debatable. In this report we present the results of XPS study of the SnO2 thin films after various treatments in vacuum, oxygen, and both dry and humid atmospheres (Tan=25-600°C). SnO2 films were deposited by spray pyrolysis method. We analyzed the changes of the SnO2 surface stoichiometry, energy positions of main XPS peaks, and concentration of adsorbed particles. On the base of obtained results the assumptions on the nature of absorbed species on the SnO2 surface have been made
Keywords :
X-ray photoelectron spectra; chemisorption; gas sensors; pyrolysis; semiconductor materials; semiconductor thin films; 25 to 600 degC; SnO2; XPS study; absorbed species; adsorbed particles; chemisorbed species; dry atmospheres; gas sensitive thin films; humid atmospheres; solid state gas sensors; spray pyrolysis method; surface stoichiometry; Annealing; Atmosphere; Chemical engineering; Production; Solid state circuits; Spraying; Sputtering; Surface treatment; Tin; Transistors;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.890202
