Title :
VNA-calibration and S-parameter characterization of submillimeter wave integrated membrane circuits
Author :
Zhao, Huan ; Tang, Aik-Yean ; Sobis, Peter ; Bryllert, Tomas ; Yhland, Klas ; Stenarson, Jörgen ; Stake, Jan
Author_Institution :
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Göteborg, Sweden
Abstract :
A TRL-calibration kit enabling S-parameter characterization of membrane circuits has been developed for the WR-03 band. The TRL-design features 3 μm thick GaAs membrane circuits packaged in E-plane split waveguide blocks. Membrane filters have been characterized after the calibration.
Keywords :
III-V semiconductors; S-parameters; calibration; gallium arsenide; submillimetre wave filters; submillimetre wave integrated circuits; E-plane split waveguide blocks; GaAs; S-parameter; TRL-calibration kit; VNA-calibration; WR-03 band; membrane filters; size 3 mum; submillimeter wave integrated membrane circuits; Biomembranes; Calibration; Electromagnetic waveguides; Frequency measurement; Integrated circuit modeling; Scattering parameters; Standards;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612446
