• DocumentCode
    2710311
  • Title

    Micro and Nano Characterization Facility: Operations Methodology and Technical Management

  • Author

    Mishra, Vijay ; Raghavan, Srinivasan ; Bhat, Navakanta ; Pratap, Rudra

  • Author_Institution
    CeNSE, IISc, Bangalore, India
  • fYear
    2012
  • fDate
    9-10 July 2012
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Summary form only given. The Micro and Nano Characterization Facility (MNCF) located in Centre for Nano Science and Engineering (CeNSE) building on the Indian Institute of Science (IISc, Bangalore, INDIA) campus is a centralized facility for characterization of Micro and Nano Devices. The National Nanofabrication Centre (NNFC) which is 10,000 sq. ft. of clean room housing state of the art equipment for nanofabrication is located in the same building. The MNCF is 5000 sq. ft precision controlled environment facility housing 4 distinct laboratories for Electrical, Mechanical, Optical and Material Characterization. The MNCF is a national facility with plethora of high end equipment spanning over multiple disciplines of nano science and engineering rarely found under a single roof. The prime funding agencies to establish this facility are NPMAS-DRDO and MCIT. MNCF is a fully-staffed, user research facility at IISc that offers researchers convenient and reasonably priced access to a wide- range of state-of-the-art analytical instrumentation and services. The Mission of this facility is to support research and educational objectives of CeNSE, IISc and offer state of the art characterization facilities and services to nanoscience academia (thorugh INUP), related industries and National Laboratories. The CeNSE witnesses multidesciplinary research activities in nano-scale electronics, nano technologies, smart materials, micro and nanoelectromechanical systems (NEMS, MEMS), bio-electronic interfaces and integrated small-scale systems. Various characterization techniques available in MNCF are RF Characterization, AC/DC Characterization, AC/DC Characterization at different temperatures in electrical characterization lab. Mechanical characterization of MNCF is equipped with techniques like laser dopplar vibrometry, Stroboscopic Video Microscopy, White Light Interferometry, Non-destructive acoustic Investigations, Atomic Force Microscopy, Tensile and compressive strength measure- ents. Material Characterization Lab houses SEM, FIB, Nano particle analysis techniques and optical characterization lab facilitates STM, PL, RAMAN Spectroscopy, Solar Cell Characterization and quantum efficiency measurements. XPS and XRD facilities are scheduled for commissioning soon. This paper discusses various challenges involved in establishing the infrastructure of the facility, financial and technical operations, staffing, access control and maintenance of user discipline during its´ 24/7 operations.
  • Keywords
    clean rooms; microfabrication; micromechanical devices; nanoelectromechanical devices; nanofabrication; production facilities; AC/DC characterization; Bangalore; CeNSE building; Centre for Nano Science and Engineering; FIB; IISc; Indian Institute of Science; MCIT; MEMS; MNCF; Micro and Nano Characterization Facility; NEMS; NNFC; NPMAS-DRDO; National Laboratories; National Nanofabrication Centre; PL; RAMAN spectroscopy; RF characterization; SEM; XPS facilities; XRD facilities; atomic force microscopy; bio-electronic interfaces; clean room; compressive strength measurements; electrical characterization lab; laser dopplar vibrometry; material characterization; mechanical characterization; microelectromechanical systems; nano particle analysis techniques; nano science; nano technologies; nano-scale electronics; nanoelectromechanical systems; nanofabrication; nondestructive acoustic investigations; optical characterization lab facilitates STM; quantum efficiency measurements; smart materials; solar cell characterization; stroboscopic video microscopy; technical management; tensile strength measurements; white light interferometry; Biomedical optical imaging; Buildings; Laboratories; Materials; Nanofabrication; Nanoscale devices; Optical interferometry;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial
  • Conference_Location
    Berkeley, CA
  • ISSN
    0749-6877
  • Print_ISBN
    978-1-4577-1751-2
  • Electronic_ISBN
    0749-6877
  • Type

    conf

  • DOI
    10.1109/UGIM.2012.6247094
  • Filename
    6247094